Jiangsu Xinhua Semiconductor Material Technology Co., Ltd. annual output of 5000 tons of high purity silicon for integrated circuits project

PROJECT REQUIREMENT

The combined air treatment unit of this project is applied to the clean production plant, the project scope includes: reduction plant A, reduction plant B, finishing plant, which includes packaging room, crushing and sorting room, silicon material temporary storage room, pulse crushing room, pickling room and other workshops with different production functions. According to the requirements of temperature and humidity of each plant, the air treatment process is designed: after mixing the new return air in summer, it is filtered in the initial effect, then cooled and dehumidified by cold water coil, heated by steam coil, processed by medium effect and high efficiency filter and sent to the workshop; In winter, the new return air is mixed through the initial effect filter, and then heated by the steam coil, and then processed by the medium effect and high efficiency filter, and sent to the workshop, if the mixed air temperature is less than 5 degrees, the steam preheating coil is opened. Some units need to be equipped with secondary return air and steam humidifier. According to the design of the air treatment system, the high efficiency filter section is partly installed in the air conditioning box and partly installed in the air duct outlet.The units are equipped with G4 plate initial effect and F8 bag medium effect filters, among which the workshop with high cleanliness requirements should also be equipped with H13 high efficiency filters. In addition, because the air contains HCL, the main components in the unit such as filters, coils, fans, motors, etc., should have corresponding anti-corrosion measures, and all parts in contact with the air need to be separately sprayed. In addition to ensuring that the unit components can be used for a long time, it is necessary to avoid the particles generated by corrosion into the air supply pipe.

Jiangsu Xinhua Semiconductor Material Technology Co., Ltd. is a joint venture between GCL Poly Energy Holdings Co., LTD., the leading PV enterprise of GCL Group, and the National Integrated Circuit Industry Investment Fund Co., LTD. Its business scope is mainly research and development, production and sales of semiconductor-grade polysilicon and other semiconductor raw materials and electrochemical products. The total investment is about 3.8 billion Yuan, the production scale is 5,000 tons/year, and the production capacity ranks third in the world. The project is a strong base project won by the Ministry of Industry and Information Technology in 2016, a key project in Jiangsu Province, and a major project in Xuzhou City.

Air conditioning scheme
The unit of this project has high requirements for anti-corrosion performance, and the anti-corrosion treatment measures of each component are as follows：
1、   The unit inner panel, filter mounting frame, coil frame, fan motor bracket, water plate and other sheet metal parts are made of SUS304 stainless steel plate；
2、   The filter material of the junior primary&middle efficiency filter is made of chemical fiber non-woven material, and the filter material of the high efficiency filter is made of low boron glass fiber material, and the frame is ABS plastic frame；
3、   The cooling coils were treated with aluminum fins of copper tubes and the steam coils were treated with aluminum fins of carbon steel tubes；
4、   The steam humidifier adopts 304 stainless steel spray rod, and the surface is coated with high-temperature ceramic heat insulation coating through three high-temperature sintering process；
5、   All parts in contact with air are coated with epoxy resin。
According to the requirements of different production plants for air treatment, the function section is arranged, and the parameters of cooling and heating coils and humidifiers can meet the design requirements. The head-on wind speed of the coil is less than 2.5m/s, and the flying water is prevented. The maintenance section is reasonably set in the unit for the maintenance of each main function section。

Project summary
Project location: Xuzhou, Jiangsu
Industry: Electronic semiconductor
Design considerations: Clean, anti-corrosion, precise temperature and humidity control
Total air flow：1,430,000m3/h
Adopted model：EKDM 26 sets

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