EK has provided many EKDM combined air conditioning units, dry coils and other equipment for TongFu Microelectronics, including production workshop, auxiliary area and various supporting functional areas. The clean production workshop adopts MAU purification type combined fresh air unit to meet the requirements of air cleanliness, temperature and humidity accuracy, stability and anti-corrosion. And supporting dry coil common use, eliminate waste heat, no condensation. The auxiliary and supporting areas are equipped with compact EKDW cabinet air handling unit and fan coil unit.